Bis(trimethylsilyl)amine
Bis(trimethylsilyl)amine (also known as hexamethyldisilazane, or HMDS) is a chemical reagent with the molecular formula (CH3)3Si-NH-Si(CH3)3 which consists of ammonia substituted with two trimethylsilyl functional groups. It is a clear, colorless liquid that will hydrolyze slowly upon exposure to water.
Bis(trimethylsilyl)amide results from the deprotonation of the nitrogen atom of bis(trimethylsilyl)amines and are used as non-nucleophilic bases, including:
Organic chemistry
One of the uses of HMDS is as a reagent in condensation reactions of heterocyclic compounds such as in the microwave synthesis of a derivative of xanthine:[1]
HMDS application
Other
In photolithography, HMDS is often used in as an adhesion promoter for photoresist.
Best results are obtained by applying HMDS from the gas phase on heated substrates.[2]
In electron microscopy, HMDS can be used as an alternative to critical point drying during sample preparation.[3]
See also
References
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